Electromotive 2/2-way diaphragm globe valve

The GEMÜ C53 iComLine 2/2-way diaphragm globe valve was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried and tested GEMÜ PD technology, whereby actuator and medium are separated by a PTFE regulating cone. As the regulating cone contour, actuator stroke and connection size can be customized, the GEMÜ C53 iComLine satisfies virtually all control and flow requirements of the semiconductor industry. The precise stepper motor, in conjunction with the ultra pure body materials, is particularly suitable for lithography, CMP, and etching processes, as well as analytical applications in semiconductor production.