Solutions for the highest demands
The semiconductor industry demands maximum process reliability, chemical resistance and reliable handling of critical media. Ultra pure water, corrosive chemicals and abrasive slurries require robust, space- and cleanroom-optimized solutions that function reliably.
The semiconductor industry sets the most stringent requirements for process reliability, chemical resistance and the reliable handling of critical media. Ultra pure water, corrosive chemicals and corrosive slurries in particular require robust solutions that function reliably even under strict purity and space requirements.
We support our customers in the safe channelling of media in wet processes, the continuous supply of ultra pure water and process chemical media, and the planning of cost-effective supply systems. Our valves, measurement and control systems enable low-particle process control, high material resistance and precise control. This is how we create the basis for stable and reproducible processes in sensitive manufacturing environments.
The supply of ultra high purity chemicals is essential for quality and process reliability in high-tech production. Corrosive media in cleaning and etching processes place high demands on material resistance and purity. From chemical mixing to drainage, reliable systems are crucial for stable and efficient production.
In semiconductor factories, the flow of media to the process tools is precisely controlled. Back pressure controls maintain constant line pressure, even with fluctuating volumetric flow, due to individually controllable outlets.
© AP&S International GmbH
The DFS mixing system produces ammonium hydroxide (NH₄OH) of the highest purity (<10 ppt) for critical semiconductor processes. CleanStar valves with high-flow bodies are used in cooperation with GEMÜ. They enable maximum flow capability, chemical resistance and uncompromising purity.
The result: Stable processes, reduced downtime and maximum product reliability in application.
© Diversified Fluid Solutions
The handling of abrasive media is essential for semiconductor production. From coarse-grained cutting slurry in silicon cutting to fine polishing slurry in the CMP process, every medium requires the utmost care in order to produce mirror-finish wafers for precise structuring.
The supply of CMP slurry places high demands on media channelling. Flow turbulence can lead to particle agglomeration and adversely affect filter performance. A compact, flow-optimized solution ensures even distribution and stable processes.
The iComLine valve blocks GEMÜ PC50 enable you to reliably prevent these flow turbulence effects.
Wet processes are a central component of semiconductor production and place the highest demands on plants and components. While simple applications have lower purity requirements, modern chip processes require corrosive chemicals, the absence of particles, and chemical resistance. Ultra pure valves made of PTFE/PFA ensure maximum process reliability here.
Text: FOUPs transport wafers between cleanroom processes such as lithography, CMP and etching. Thorough cleaning is essential to prevent particles and AMC. The application requires reliable mixing of cleaning media, handling of gases and purified water, and ultra pure fluoroplastic components in a compact design for space-critical environments.
You will find options for meeting these requirements in the application.
During chip production, chemical baths are continuously monitored and topped up to maintain stable concentration and temperature.
Precise measurement and control systems from GEMÜ help you to ensure precise control for consistently high process quality in cleanrooms.
For efficient cleaning processes, e.g. for FOUP and EUV mask boxes, a precise and constant media temperature is crucial. High temperatures speed up cleaning, but require precise mixing of purified hot water and room temperature water.
GEMÜ offers you special mixing solutions that ensure process stability, repeatability and maximum efficiency.
Solvents such as isopropanol, acetone and NMP are indispensable in semiconductor production, but have stringent requirements for resistance, purity and safety.
Dead space-minimized stainless steel valves and multi-port valve block systems meet these requirements and ensure ATEX-compliant explosion protection and reliable processes for critical applications.
In the semiconductor industry, organic solvents such as isopropanol, acetone and NMP are used for cleaning and photoresist removal.
Our diaphragm valves or M-block solutions in stainless steel meet the stringent requirements for fire and explosion protection, surface finish and secure connections. Ideal for precise and safe solvent supply.
Product examples
With our products, you get reliable, safe and tried-and-tested solutions for the semiconductor industry from a single source. Discover suitable valves for your plant here.
Tested quality
The advantages for you
From individual components to welding configurations mounted on base plates to block solutions, we offer a wide range of solutions for your application.
Thanks to many years of collaboration with leading semiconductor manufacturers, we have built up extensive expertise and maintained long-standing customer.
Thanks to our cleanroom plant in Emmen (Switzerland), we ensure compliance with DIN ISO 4644-1 and the highest production and assembly quality.
Our stainless steel range of diaphragm valves offers you a wide range of solutions – from single valves to block systems for organic solvents.
