C5312D7330 5C1S12AR3235 HP

iComLine valve, electric

Item number: 88849145
Description
Type C53 Plastic globe valve, electric
Connection size 12 3/4", international code: 12
Body configuration D 2/2-way body
Connection type 73 Flare connection with CPFA union nut
Valve body material 30 PFA, perfluoroalkoxy
Seal material 5 PTFE
Voltage / Frequency C1 24 V DC
Control module S1 Positioner 4-20mA Error position close
Actuator version 2A Actuator size 2 Seat size 9,55 mm
Regulating cone R3235 1 m³/h - linear
High Purity version HP High Purity

This article is listed as a Dual-Use-good according to Regulation EU 2021/821 under Control list No. 2B350g. If these goods are supplied to countries outside the EU, the relevant export restrictions apply.
Request a quotation now
To see prices login/register here

The GEMÜ C53 iComLine 2/2-way diaphragm globe valve was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried and tested GEMÜ PD technology, whereby actuator and medium are separated by a PTFE regulating cone. As the regulating cone contour, actuator stroke and connection size can be customized to meet customers' requirements, the GEMÜ C53 iComLine satisfies virtually all control and flow requirements of the semiconductor industry. The precise stepper motor, in conjunction with the ultra pure body materials, is particularly suitable for lithography, CMP, and etching processes, as well as analytical applications in semiconductor production.

  • Control valve for ultra pure applications in the semiconductor industry
  • High-resolution linear actuator with stepper motor
  • Diaphragm globe valve based on the iComLine series
  • Tried and tested plug diaphragm design
  • All media wetted parts are made of PFA or PTFE
  • 1 million qualified control switching cycles
  • Cleanroom manufacturing (HP version), complies with SEMI F 57