Critical fluid handling: Wafer coating
Substrates are transported via a fluid layer. An integrated design is possible using the GEMÜ iComLine multi-port valve blocks made from PFA: Not only are they a compact unit with which the shallow basin is injected, they also define the tank limits for the transport system. Because fluid flows around the substrates evenly, they can also be wet-chemically treated or cleaned during the transport process. The GEMÜ iComLine multi-port valve block systems can also be integrated into the tank cover.
The video shows a functional model for transporting a wafer.