Stainless steel components for applications in the semiconductor industry

Stainless steel components for applications in the semiconductor industry

Stainless steel diaphragm valves – the perfect choice for solvent supply

Critical and corrosive solvents are used in the manufacturing process for semiconductor products. This sets stringent requirements in terms of the chemical resistance and explosion protection of the supply components of a plant. GEMÜ stainless steel diaphragm valves are ideal for these high-purity solvent applications. Here we will introduce you to our various product types.


Increasing complexity – We have the solution

GEMÜ is your development partner for sub-assemblies.


We offer everything from single components to the manufacture of simple welding and stick configurations right up to complex sub-assemblies and manifolds. 

We are happy to advise you on the right valve designs for your application. 


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Stainless steel components in chemicals & wafer production for:

• H2SO4 


• H3PO4 

Stainless steel components in solvent supply for:

• Isopropanol

• Acetone

• N-methylpyrrolidone (NMP)

Stainless steel components in the process level for:

• Lithography (photoresist)

➥ Advantages of stainless steel components in solvent supply

Good conductivity

The solvents used have a low flash point and become electrostatically charged very easily in piping. This means that solvent supply systems must be built with materials that discharge the static and earthed. Stainless steel has very good conductivity. 

High grade of surface finish

The surface roughness of the plant components used influences how heavily the flowing medium is charged. Since 2018, GEMÜ has owned a surface technology centre and is continuously expanding its expertise in this area. A roughness of Ra 0.25 to Ra 0.8 is recommended for solvent supply in order to avoid electro-static build-up. The high grade of surface finish also means you benefit from improved cleanability.

High resistance

Stainless steel has the advantage that it is a very resistant material. This means that corrosive media can also be used without contaminating the solvent or the valve starting to leak. Our stainless steel valves are resistant against all common solvents such as:

• 2-Propanol 99.8%

• Ethyl acetate

• Acetone


• AZ400T




➥ Valve bodies and connection types

Special connection types

Butt weld spigots and VCR connections are considered as standard connections for stainless steel components. Depending on whether the valve components must be easy to install or can be welded in, different connections are used.



Valve bodies

Forged bodies are standard bodies for solvent supply systems to ensure minimum surface roughness.



➥ The alternative: Carbon-filled PTFE

Carbon-filled PTFE as a conductive alternative to stainless steel

Components made from resistant PTFE and PTFA are also used in particularly cost-sensitive areas. Plastics as electrical insulators can become statically charged due to friction and are therefore rather unsuitable for solvent supply. However, by adding conductive carbon in the fluoropolymer production process, a specific conductivity can be achieved. The charges generated can be discharged to other locations so that sudden discharges and the ignitions associated with this are prevented.

GEMÜ offers bodies made from conductive PTFE as well as tubes and union nuts made from carbon-filled PFA. For example, the GEMÜ C60 and C67 diaphragm valves or the PC50 iComLine.  M-block diaphragm globe valve. 


GEMÜ stainless steel and plastic components

Manually operated valves

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Pneumatically operated valves 

Plastic valves

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Info flyer Stainless steel components for solvent applications in the semiconductor industry

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