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Stainless steel diaphragm valves – the perfect choice for solvent supply
Critical and corrosive solvents are used in the manufacturing process for semiconductor products. This sets stringent requirements in terms of the chemical resistance and explosion protection of the supply components of a plant. GEMÜ stainless steel diaphragm valves are ideal for these high-purity solvent applications. Here we will introduce you to our various product types.
Increasing complexity – We have the solution
GEMÜ is your development partner for sub-assemblies.
We offer everything from single components to the manufacture of simple welding and stick configurations right up to complex sub-assemblies and manifolds.
We are happy to advise you on the right valve designs for your application.
Stainless steel components in chemicals & wafer production for:
• H2SO4
• TMAH
• H3PO4
Stainless steel components in solvent supply for:
• Isopropanol
• Acetone
• N-methylpyrrolidone (NMP)
Stainless steel components in the process level for:
• Lithography (photoresist)
➥ Advantages of stainless steel components in solvent supply
Good conductivity
The solvents used have a low flash point and become electrostatically charged very easily in piping. This means that solvent supply systems must be built with materials that discharge the static and earthed. Stainless steel has very good conductivity.
High grade of surface finish
The surface roughness of the plant components used influences how heavily the flowing medium is charged. Since 2018, GEMÜ has owned a surface technology centre and is continuously expanding its expertise in this area. A roughness of Ra 0.25 to Ra 0.8 is recommended for solvent supply in order to avoid electro-static build-up. The high grade of surface finish also means you benefit from improved cleanability.
High resistance
Stainless steel has the advantage that it is a very resistant material. This means that corrosive media can also be used without contaminating the solvent or the valve starting to leak. Our stainless steel valves are resistant against all common solvents such as:
• 2-Propanol 99.8%
• Ethyl acetate
• Acetone
• NMP
• AZ400T
• NBA
• PGMEA
➥ Valve bodies and connection types
Special connection types
Butt weld spigots and VCR connections are considered as standard connections for stainless steel components. Depending on whether the valve components must be easy to install or can be welded in, different connections are used.
Valve bodies
Forged bodies are standard bodies for solvent supply systems to ensure minimum surface roughness.
➥ The alternative: Carbon-filled PTFE
Carbon-filled PTFE as a conductive alternative to stainless steel
Components made from resistant PTFE and PTFA are also used in particularly cost-sensitive areas. Plastics as electrical insulators can become statically charged due to friction and are therefore rather unsuitable for solvent supply. However, by adding conductive carbon in the fluoropolymer production process, a specific conductivity can be achieved. The charges generated can be discharged to other locations so that sudden discharges and the ignitions associated with this are prevented.
GEMÜ offers bodies made from conductive PTFE as well as tubes and union nuts made from carbon-filled PFA. For example, the GEMÜ C60 and C67 diaphragm valves or the PC50 iComLine. M-block diaphragm globe valve.
GEMÜ stainless steel and plastic components
Manually operated valves
Pneumatically operated valves
Plastic valves